Publication

LI-SEMI: Semiconductor Standards Library

Abstract

A comprehensive collection of CGA publications covering the safe handling, storage, and use of specialty gases, electronic gases, and cryogenic fluids used in semiconductor manufacturing. This library provides practical guidance and industry best practices for managing process gas safety, operational reliability, and regulatory compliance.

This library includes:
G-1, Acetylene
G-2, Anhydrous Ammonia
G-2.1, Requirements for the Storage and Handling of Anhydrous Ammonia (an American National Standard)
G-9.1, Commodity Specification for Helium
G-12, Hydrogen Sulfide
G-13, Storage and Handling of Silane and Silane Mixtures (an American National Standard)
G-14, Nitrogen Trifluoride
G-15, Fluorine and Fluorine Mixtures with Inert Gases
G-16, Arsine
G-17, Phosphine
G-18, Hydrogen Selenide
P-8, Guideline for Safe Practices for Cryogenic Air Separation Plants
P-8.9, Bulk Liquid Oxygen, Nitrogen, and Argon Storage Systems at Production Sites
P-46, Safe Handling of Electronic Specialty Gases

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Member Price:
$1,210
Subscriber Price:
$1,210
Non-Member Price:
$2,202

Member E-Pub Price:
N/A
Subscriber E-Pub Price:
N/A
Non-Member E-Pub Price:
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Properties

Edition:
1
Published:
October 2026
Status:
Available To the Public
Size:
540 pages
Publisher:
CGA
Special Attributes:
Notes:
Committee:
CGA Member Services

Cataloging

Category
Libraries     Standards & Guidelines
Keywords
(none)
Related
G-1  |  G-12  |  G-13  |  G-14  |  G-15  |  G-16  |  G-17  |  G-18  |  G-2  |  G-2.1  |  G-9.1  |  P-46  |  P-8  |  P-8.9